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selbstjustierende Siliziumtortechnikstresses
el. технология МОП-транзисторных ЗУ с самосовмещёнными поликремниевыми затворами
microel. технология МОП-транзисторов с; технология МОП-транзисторов с самосовмещёнными поликремниевыми затворами

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