| |||
positional error | |||
planimetric error; position error | |||
run-out; runout; runout error (durch Lageverzerrung) | |||
positioning error; error of position; plane error; stepping error (mask production) |
Lagefehler: 5 phrases in 3 subjects |
Electronics | 1 |
Microelectronics | 3 |
Optics branch of physics | 1 |