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Fotolithografie f =
gen. photolithography (Lithography using plates prepared by a photomechanical process)
comp. photomasking
el. photo-lithography
IT, el. photo-offset
microel. optical lithography; photon-microlithography; photooptical lithography
opt. photolithography
lichtoptische Fotolithografie f
microel. photolithography
Fotolithografie: 11 phrases in 3 subjects
Electronics1
Information technology2
Microelectronics8