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наноструктура, полученная по технологии атомно-слоевого осаждения
stresses
nano
ALD-fabricated nanostructure
;
atomic layer deposition-fabricated nanostructure
наноструктура, полученная по технологии атомно-слоёвого осаждения
nano
ALD-fabricated nanostructure
;
atomic layer deposition-fabricated nanostructure
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