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| ion lithography | |||
| ion-beam lithography | |||
| ионно -лучевая литография: 12 phrases in 6 subjects |
| Electronics | 1 |
| General | 2 |
| Microbiology | 2 |
| Microelectronics | 2 |
| Radiolocation | 2 |
| Technology | 3 |
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