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| высокочастотная плазма; плазма высокочастотного разряда; плазма радиочастотного разряда; радиочастотная плазма | |||
| ВЧ плазма | |||
| RF plasma: 6 phrases in 5 subjects |
| Antennas and waveguides | 1 |
| Electronics | 2 |
| Makarov | 1 |
| Microelectronics | 1 |
| Physics | 1 |
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