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| 深冷泵; 低温抽气泵深冷低温抽吸 | |||
| 深冷法供气; 深冷抽气 | |||
| 低温泵 | |||
| 低温［深冷］泵; 深冷［低温］抽气 | |||
| 冷凝泵; 低温抽气泵; 深冷抽吸 | |||
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cryopump : 3 phrases in 1 subject |
| Refrigeration | 3 |
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