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Microelectronics
containing
Versetzung
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English
Klettern von
Versetzungen
climbing of dislocations
μm mikrolithografische
Versetzungen
in Inkrementen von 0,1 μm
microlithographic displacements in increments of 0.1
Versetzung
mit angelagerten Metallionen
decorated dislocation
Versetzung
von der Strahlachse
offset from the beam axis
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