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等离子能
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低能等离子体增强化学汽相淀积
low energy plasma-enhanced chemical vapor deposition
低能等离子体清洗
low energy plasma cleaning
感应耦合等离子体原子发射能谱分析法
inductively coupled plasma-atomic emission spectroscopy
感应耦合等离子体发射能谱分析法
inductively coupled plasma emission spectroscopy
感应耦合等离子体能谱测定法
inductively coupled plasma spectrometry
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