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Terms containing 等离子体压强 | all forms | in specified order only
SubjectChineseEnglish
el.低压化学汽相淀积在110取向等离子体增强化学汽相淀积多晶硅膜上的非晶硅膜LPCVD a-Si film deposited onto a 110-oriented PECVD poly-Si film
avia.等离子体压强plasma pressure
el.等离子体增强低压化学汽相淀积plasma-enhanced low-pressure chemical vapor deposition

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