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等离子体压强
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Chinese
English
el.
低压化学汽相淀积在
110
取向等离子体增强化学汽相淀积多晶硅膜上的非晶硅膜
LPCVD a-Si film deposited onto a
110
-oriented PECVD poly-Si film
avia.
等离子体压强
plasma pressure
el.
等离子体增强低压化学汽相淀积
plasma-enhanced low-pressure chemical vapor deposition
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