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微波等离子体
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Chinese
English
低压
微波等离子体
low-pressure microwave plasma
微波动力等离子体光源
microwave powered plasma light source
微波等离子体
气相化学沉积
microwave plasma chemical vapour deposition
微波等离子体
气相化学沉积
microwave plasma chemical vapor deposition
微波等离子体
气相沉积
microwave plasma deposition
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