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Electronics
containing
反等离子体
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共振诱导等离子体蚀刻反应器
resonant inductive plasma etcher reactor
反应等离子体化学汽相淀积
reactive plasma chemical vapor deposition
反应等离子体增强化学汽相淀积
reactive plasma enhanced chemical vapor deposition
反应脉冲等离子体
reactive pulse plasma
圆盘式微波等离子体反应器
microwave plasma disk reactor
多圆片等离子体反应器
multiwafer plasma reactor
电子回旋共振贴近式等离子体反应加工系统
electron cyclotron resonance close proximity plasma processing system
磁约束等离子体反应离子蚀刻
magnetically confined plasma reactive ion etching
等离子体反应溅射淀积
plasma reactive sputtering deposition
等离子体增强反应离子蚀刻
plasma-enhanced reactive ion etching
等离子体引发聚合反应
plasma-initiated polymerization
贴近式等离子体反应加工系统
close proximity plasma processing system
隔板约束等离子体反应离子蚀刻
flap shield confined plasma reactive ion etching
高密度等离子体反应器
high-density plasma reactor
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