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单等离子体
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Subject
Chinese
English
el.
冷壁单片式快速加热处理/微波遥控等离子体多重工艺处理
反应器
cold-wall single-wafer rapid thermal/microwave remote-plasma multiprocessing
reactor
el.
单一基片交流等离子体显示板
single substrate ac plasma display panel
tech.
单个等离子体
individual plasma
el.
单模等离子体激活化学汽相淀积
single-mode plasma-activated chemical vapor deposition
gen.
单等离子体
monoplasmatron
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