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Terms for subject Electronics containing plasma assisted chemical vapor deposition | all forms | in specified order only
| English | Chinese |
| microwave plasma-assisted chemical vapor deposition | 微波等离子体辅助化学汽相淀积 |
| plasma-assisted chemical vapor deposition | 等离子体辅助化学汽相淀积 |
| sputter-assisted plasma chemical vapor deposition | 溅射辅助等离子体化学汽相淀积 |