 |
| Subject | English | Chinese |
| el. | low-pressure, high-density plasma etcher | 低压高密度等离子体蚀刻机 |
| el. | low-pressure, high-density inductively-coupled plasma ion source | 低压高密度感应耦合等离子体离子源 |
|
| Subject | English | Chinese |
| el. | low-pressure, high-density plasma etcher | 低压高密度等离子体蚀刻机 |
| el. | low-pressure, high-density inductively-coupled plasma ion source | 低压高密度感应耦合等离子体离子源 |