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електронно-променева літографія
| з
безпосереднім | формуванням малюнка
- only individual words found| електронно-променева літографія | |
| microel. | electron-beam lithography |
| з | |
| gen. | about; against; along; among; at; by |
| формування малюнка | |
| microel. | imaging process |
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| electron-beam lithography (Yuriy Sokha) | |||
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електронно-променева літографія з : 9 phrases in 1 subject |
| Microelectronics | 9 |
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