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| вакуум-возгонка; вакуум-сублимация; газофазное осаждение; вакуумная сублимация | |||
| метод вакуумной сублимации | |||
| вакуумная возгонка | |||
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Vakuumsublimation : 1 phrase in 1 subject |
| Microelectronics | 1 |
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