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| Maskenionenstrahllithografie f | |||
| Masked Ion Beam Lithography | |||
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| Maskenschattenprojektion f (с передачей изображения в масштабе 1:1) | |||
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проекционная ионно-лучевая литография с шаблоном : 3 phrases in 1 subject |
| Microelectronics | 3 |
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