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плазмохимическое осаждениеstresses
microel. PCVD-Prozess; Plasma-CVD-Technik n; plasmagestützte Dampfphasenbeschichtung Dampfphase; plasmaunterstützte CVD; plasmagestützte Dampfphasenbeschichtung; plasmaunterstützte
плазмохимическое осаждение
: 3 phrases in 1 subject
Microelectronics3

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