 |
бесплазменное
| сухое травление
| бесплазменный | |
| Makarov. | plasmaless |
| сухое травление | |
| el. | dry etching |
| microel. | dry etch |
| |||
| plasmaless | |||
|
бесплазменное сухое травление : 2 phrases in 2 subjects |
| Immunology | 1 |
| Makarov | 1 |
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