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usable feature size in the 1.0-2.0 micrometre range
microel.
nutzbare Strukturbreite firn 1- bis 2-μm-Bereich
;
nutzbare Elementgröße firn 1- bis 2-μm-Bereich
;
nutzbare Linienbreite firn 1- bis 2-μm-Bereich
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