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fine motion
| alignment stage
| fine motion | |
| astr. | Feinbewegung |
| alignment stage | |
| microel. | Justiertisch; Justierphase |
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| Feinbewegungen f | |||
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| Feinbewegung f | |||
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fine motion alignment stage : 2 phrases in 2 subjects |
| Microelectronics | 1 |
| Optics branch of physics | 1 |
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