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| распыление материала мишени | |||
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target sputtering : 11 phrases in 7 subjects |
| Crystallography | 1 |
| Electronics | 2 |
| Makarov | 1 |
| Mass media | 1 |
| Microelectronics | 1 |
| Nanotechnology | 2 |
| Technology | 3 |
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