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to phrases
orientation dependent etch
stresses
el.
ориентационное травление
microel.
анизотропное травление
;
анизотропный травитель
orientation-dependent etch
tech.
анизотропное травление
;
анизотропный травитель
orientation dependent etch:
3 phrases
in 1 subject
Microelectronics
3
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