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Electronics
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刻像
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先进光刻用自动提高分辨率成像
照明器
automated enhanced resolution imaging for advanced lithography
illuminator
干法蚀刻正性抗蚀剂成像工艺
positive resist image by dry etching process
成像干涉光刻
imaging interferometric lithography
缩小成像投影电子束光刻
projection electron-beam lithography with demagnification imaging
超导贮能环先进光刻成像系统
super-conducting advanced lithography imaging system
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